Measurable Characterization of the Slight Force Transducer used in Nano indentation Tools

International Journal of Applied Physics

© 2016 by SSRG - IJAP Journal

Volume 3 Issue 3

Year of Publication : 2016

Authors : Benjamin, Alina

10.14445/23500301/IJAP-V3I6P103

How to Cite?

Benjamin, Alina, "Measurable Characterization of the Slight Force Transducer used in Nano indentation Tools," SSRG International Journal of Applied Physics, vol. 3,  no. 3, pp. 19-23, 2016. Crossref, https://doi.org/10.14445/23500301/IJAP-V3I6P103

Abstract:

Quantitative description of the mechanical possessions of resources in micro nano scale using depth-sensing depression method demands high performance of nanoindentation instruments in use. In this paper, the efforts to standardize the capacitive control transducer of a profitable tool are obtainable, where the quasi-static characteristic of the force transducer has sustained calibrated by a whole compensation balance with a resolution of 1 nN. To examine the dynamic response of the transducer, an electrostatic MEMS (Micro-Electro-Mechanical System) based on nano-force transfer standard with nano-Newton resolution and a bandwidth up to 6 kHz have remained employed. Primary novel results designate that the power transducer below correction needs a detailed force indecision less than 300 nN in the calibration range of 1 mN; the transient period at contact opinions totals to 10 seconds; 3 the overshoot of engagement is pre-load dependent.

Keywords:

Nanometrology; Nanoindentation Instrument; Nano-Force Transducer; Microelectromechanical Systems; Nano-Force Calibration.

References:

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