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Volume 13 | Issue 5 | Year 2026 | Article Id. IJECE-V13I5P106 | DOI : https://doi.org/10.14445/23488549/IJECE-V13I5P106

Area Optimized Spiral Cantilever Array for Ultra Low Power Piezoelectric MEMS Energy Harvesting

Vicky Butram, Namrata Gupta, Ashwini Anjikar, Pankaj Jain

Received Revised Accepted Published
07 Feb 2026 08 Mar 2026 07 Apr 2026 27 May 2026

Citation :

Vicky Butram, Namrata Gupta, Ashwini Anjikar, Pankaj Jain, "Area Optimized Spiral Cantilever Array for Ultra Low Power Piezoelectric MEMS Energy Harvesting," International Journal of Electronics and Communication Engineering, vol. 13, no. 5, pp. 58-64, 2026. Crossref, https://doi.org/10.14445/23488549/IJECE-V13I5P106

Abstract

This work presents an approach to embed an array of spiral cantilevers with different resonant frequencies on a silicon substrate layer, with all four sides fixed. The effect of four-square spiral cantilevers on modes is discussed when connected in series and parallel combinations to form an array. For geometric optimization, up to 9 spiral element harvesters are analyzed, and the maximum harvested power is achieved by connecting four spiral elements. The total harvested power of 3.5 μW is obtained over the frequency band 264 Hz to 272 Hz. The normalized areal and volumetric power density were found to be 5.17×10−3 μW/mm2• g2• Hz and 1.15 μW/mm3• g2• Hz, respectively.

Keywords

Cantilever, Energy harvester, MEMS, Piezoelectric, Power Density, Spiral Array.

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