Electromechanical Modelling and Analysis of RF MEMS Switch for mm-wave Application

International Journal of Electronics and Communication Engineering

© 2024 by SSRG - IJECE Journal

Volume 11 Issue 4

Year of Publication : 2024

Authors : R. Karthick, S.P.K. Babu

10.14445/23488549/IJECE-V11I4P110

How to Cite?

R. Karthick, S.P.K. Babu, "Electromechanical Modelling and Analysis of RF MEMS Switch for mm-wave Application," SSRG International Journal of Electronics and Communication Engineering, vol. 11,  no. 4, pp. 89-101, 2024. Crossref, https://doi.org/10.14445/23488549/IJECE-V11I4P110

Abstract:

This paper presents the design, simulation, and analysis of two fundamental configurations aimed at implementing capacitive MEMS switches in a shunt arrangement. The objective of this systematic electromechanical modeling approach is to create MEMS switches with a low actuation voltage while preserving their RF and dynamic performance, especially for mmwave applications. The switch’s dynamic performance was analyzed utilizing COMSOL Multiphysics software, while the radio frequency (RF) properties were acquired through the employment of the HFSS software. The structure of Design 1, without flexure, results in a spring constant of 1.57 N/m and a resonant frequency of 54 kHz. Conversely, Design 2, incorporating a Fixed-Fixed flexure, demonstrates a spring constant of 0.80 N/m and a resonant frequency of 38 kHz, accomplished through meticulous adjustment of the thickness-to-length ratio. Both designs employ Aluminium as the material for the beam, with specifications of 260 μm for length, 100 μm for breadth, and 0.5 μm for thickness. Taking into account the influence of squeeze film, a finalized gap of 1.9 μm between the upper electrode and dielectric layer leads to a pull-in voltage of 7 V for Design 1 and 4.4 V for Design 2, respectively. A thorough investigation of incorporating 60 holes, each measuring 64 μm² (8µm x 8µm), in the beam membrane of Design 2 has been conducted. The inclusion of these holes reduces the pull-in voltage to 4 V and the switching time to 28 μs. Additionally, it effectively mitigates most of the stress experienced by the structure. Finally, the addition of a dielectric layer measuring 0.1 μm, utilizing Si3N4 as the dielectric material, further justifies the optimized structure of Design 2 as suitable for operating throughout the frequency range of 15 to 40 GHz.

Keywords:

mm-wave, RF MEMS switch, Shunt capacitive switch, ICT, IoT.

References:

[1] Jacopo Iannacci, and H. Vincent Poor, “Review and Perspectives of Micro/Nano Technologies as Key-Enablers of 6G,” IEEE Access, vol. 10, pp. 55428-55458, 2022.
[CrossRef] [Google Scholar] [Publisher Link]
[2] Xiaohu You et al., “Towards 6G Wireless Communication Networks: Vision, Enabling Technologies, and New Paradigm Shifts,” Science China Information Sciences, vol. 64, pp. 1-74, 2021.
[CrossRef] [Google Scholar] [Publisher Link]
[3] David Dubuc, Katia Grenier, and Jacopo Iannacci, 18 - RF-MEMS for Smart Communication Systems and Future 5G Applications, Smart Sensors and MEMs, 2 nd ed., pp. 499-539, 2018.
[CrossRef] [Google Scholar] [Publisher Link]
[4] Chuan Zhang et al., “Artificial Intelligence for 5G and Beyond 5G: Implementations, Algorithms, and Optimizations,” IEEE Journal on Emerging and Selected Topics in Circuits and Systems, vol. 10, no. 2, pp. 149-163, 2020.
[CrossRef] [Google Scholar] [Publisher Link]
[5] Li-Ya Ma et al., “Comprehensive Study on RF-MEMS Switches Used for 5G Scenario,” IEEE Access, vol. 7, pp. 107506-107522, 2019.
[CrossRef] [Google Scholar] [Publisher Link]
[6] Alexey Tkachenko, Igor Lysenko, and Andrey Kovalev, “Investigation and Research of High-Performance RF MEMS Switches for Use in the 5G RF Front-End Modules,” Micromachines, vol. 14, no. 2, pp. 1-42, 2023.
[CrossRef] [Google Scholar] [Publisher Link]
[7] Raji George, C.R.S. Kumar, and S.A. Gangal, “Design of Series RF MEMS Switches Suitable for Reconfigurable Antenna Applications,” 2017 International Conference on Circuit, Power and Computing Technologies (ICCPCT), Kollam, India, pp. 1-5, 2017.
[CrossRef] [Google Scholar] [Publisher Link]
[8] Raj Kumari, and Mahesh Angira, “RF-MEMS Capacitive Switches: Enabling Transition Towards 5G/B5G Applications,” International Journal of Information Technology, vol. 15, no. 7, pp. 3889-3897, 2023.
[CrossRef] [Google Scholar] [Publisher Link]
[9] Vijay K. Varadan, K. J. Vinoy, and K. A. Jose, RF MEMS and Their Applications, Wiley, pp. 376, 2003.
[Google Scholar] [Publisher Link]
[10] Gabriel M. Rebeiz, RF MEMS: Theory, Design, and Technology, Wiley, 2003.
[CrossRef] [Google Scholar] [Publisher Link]
[11] Anurag Swarnkar, Amitava DasGupta, and Deleep R Nair, “Design, Fabrication and Characterization of RF MEMS Shunt Switch for Wideband Operation of 3 GHz to 30 GHz,” Journal of Micromechanics and Microengineering, vol. 29, no. 11, 2019.
[CrossRef] [Google Scholar] [Publisher Link]
[12] Isibor E. Obuh et al., “Low-Cost Microfabrication for MEMS Switches and Varactors,” IEEE Transactions on Components, Packaging and Manufacturing Technology, vol. 8, no. 9, pp. 1702-1710, 2018.
[CrossRef] [Google Scholar] [Publisher Link]
[13] Elham Pirmoradi, Hadi Mirzajani, and Habib Badri Ghavifekr, “Design and Simulation of a Novel Electro-Thermally Actuated Lateral RF MEMS Latching Switch for Low Power Applications,” Microsystem Technologies, vol. 21, pp. 465-475, 2015.
[CrossRef] [Google Scholar] [Publisher Link]
[14] Sai Pranav Chokkara et al., “Design, Simulation and Analysis of a Slotted RF MEMS Switch,” Transactions on Electrical and Electronic Materials, vol. 23, pp. 419-429, 2022.
[CrossRef] [Google Scholar] [Publisher Link]
[15] Li-Feng Wang et al., “Laterally-Actuated Inside-Driven RF MEMS Switches Fabricated by a SOG Process,” Journal of Micromechanics and Microengineering, vol. 25, no. 6, 2015.
[CrossRef] [Google Scholar] [Publisher Link]
[16] Qiannan Wu et al., “Design and Fabrication of a Series Contact RF MEMS Switch with a Novel Top Electrode,” Nanotechnology and Precision Engineering, vol. 6, no. 1, 2023.
[CrossRef] [Google Scholar] [Publisher Link]
[17] B.V.S. Sailaja, and Ketavath Kumar Naik, “Design and Analysis of Serpentine Meander Asymmetric Cantilever RF-MEMS Shunt Capacitive Switch,” Analog Integrated Circuits and Signal Processing, vol. 102, pp. 593-603, 2020.
[CrossRef] [Google Scholar] [Publisher Link]
[18] Vivek Verma, and Mahesh Angira, “A Shunt Capacitive Switch Based on RF MEMS Technology for 5G Application: Design and Investigation,” 2021 International Conference on Intelligent Technologies (CONIT), Hubli, India, pp. 1-4, 2021.
[CrossRef] [Google Scholar] [Publisher Link]
[19] Sudhanshu Shekhar, K J Vinoy, and G K Ananthasuresh, “Low-Voltage High-Reliability MEMS Switch for Millimeter Wave 5G Applications,” Journal of Micromechanics and Microengineering, vol. 28, no. 7, 2018.
[CrossRef] [Google Scholar] [Publisher Link]
[20] Jasmina Casals-Terré et al., “Enhanced Robustness of a Bridge-Type Rf-Mems Switch for Enabling Applications in 5G and 6G Communications,” Sensors, vol. 22, no. 22, pp. 1-20, 2022.
[CrossRef] [Google Scholar] [Publisher Link]
[21] Vishram B. Sawant, Suhas S. Mohite, and Laukik N. Cheulkar, “Comprehensive Contact Material Selection Approach for RF MEMS Switch,” Materialstoday Proceedings, vol. 5, no. 4, pp. 10704-10711, 2018.
[CrossRef] [Google Scholar] [Publisher Link]
[22] Osor Pertin, and Kurmendra, “Pull-in-Voltage and RF Analysis of MEMS Based High Performance Capacitive Shunt Switch,” Microelectronics Journal, vol. 77, pp. 5-15, 2018.
[CrossRef] [Google Scholar] [Publisher Link]
[23] Afshin Kashani Ilkhechi et al., “A New Electrostatically Actuated Rotary Three-State DC-Contact RF MEMS Switch for Antenna Switch Applications,” Microsystem Technologies, vol. 23, pp. 231-243, 2017.
[CrossRef] [Google Scholar] [Publisher Link]
[24] Tai-Ran Hsu, MEMS and Microsystems: Design and Manufacture, McGraw Hill, pp. 1-436, 2002.
[Google Scholar] [Publisher Link]
[25] W. Merlijn Van Spengen, Robert Puers, and Ingrid De Wolf, “On the Physics of Stiction and its Impact on the Reliability of Microstructures,” Journal of Adhesion Science and Technology, vol. 17, no. 4, pp. 563-582, 2003.
[CrossRef] [Google Scholar] [Publisher Link]
[26] G.M. Rebeiz, and J.B. Muldavin, “RF MEMS Switches and Switch Circuits,” IEEE Microwave Magazine, vol. 2, no. 4, pp. 59-71, 2001.
[CrossRef] [Google Scholar] [Publisher Link]
[27] Kurmendra, and Rajesh Kumar, “A Review on RF Micro-Electro-Mechanical-Systems (MEMS) Switch for Radio Frequency Applications,” Microsystem Technologies, vol. 27, no. 7, pp. 2525-2542, 2021.
[CrossRef] [Google Scholar] [Publisher Link]
[28] Sudhanshu Shekhar, K.J. Vinoy, and G.K. Ananthasuresh, “Surface-Micromachined Capacitive RF Switches with Low Actuation Voltage and Steady Contact,” Journal of Microelectromechanical Systems, vol. 26, no. 3, pp. 643-652, 2017.
[CrossRef] [Google Scholar] [Publisher Link]
[29] Shankar Dutta et al., “Effect of Residual Stress on RF MEMS Switch,” Microsystem Technologies, vol. 17, pp. 1739-1745, 2011.
[CrossRef] [Google Scholar] [Publisher Link]
[30] Surendra K. Waghmare, and D.D. Shah, “RF MEMS Capacitive Shunt Switch : A Study Based Practical Overview,” International Journal of Applied Engineering Research, vol. 13, no. 15, pp. 11830-11838, 2018.
[Google Scholar] [Publisher Link]
[31] K. Guha et al., “Novel Analytical Model for Optimizing the Pull-in Voltage in a Flexured MEMS Switch Incorporating Beam Perforation Effect,” Solid-State Electronics, vol. 137, pp. 85-94, 2017.
[CrossRef] [Google Scholar] [Publisher Link]
[32] Hao Wei et al., “High On/Off Capacitance Ratio RF MEMS Capacitive Switches,” Journal of Micromechanics and Microengineering, vol. 27, no. 5, 2017.
[CrossRef] [Google Scholar] [Publisher Link]
[33] Kurmendra, and Rajesh Kumar, “A Modified Capacitance Model of Shunt Micro Switch Based on MEMS Technology in Actuation Mode: Simulation and Analytical Study,” Journal of Physics: Conference Series, vol. 1432, no. 1, 2020.
[CrossRef] [Google Scholar] [Publisher Link]
[34] J.B. Muldavin, and G.M. Rebeiz, “High-Isolation CPW MEMS Shunt Switches. 1. Modeling,” IEEE Transactions on Microwave Theory and Techniques, vol. 48, no. 6, pp. 1045-1052, 2000.
[CrossRef] [Google Scholar] [Publisher Link]
[35] Kurmendra, and Rajesh Kumar, “Materials Selection Approaches and Fabrication Methods in RF MEMS Switches,” Journal of Electronic Materials, vol. 50, no. 6, pp. 3149-3168, 2021.
[CrossRef] [Google Scholar] [Publisher Link]
[36] Julien G. Noel, “Review of the Properties of Gold Material for MEMS Membrane Applications,” IET Circuits, Devices and Systems, vol. 10, no. 2, pp. 156-161, 2016.
[CrossRef] [Google Scholar] [Publisher Link]
[37] M.F. Ashby et al., “Selection Strategies for Materials and Processes,” Materials & Design, vol. 25, no. 1, pp. 51-67, 2004.
[CrossRef] [Google Scholar] [Publisher Link]
[38] Kurmendra, and Rajesh Kumar, “Dielectric Material Selection for High Capacitance Ratio and Low Loss in MEMS Capacitive Switch Using Ashby’s Methodology,” IOP Conference Series: Materials Science and Engineering, vol. 1020, no. 1, 2021.
[CrossRef] [Google Scholar] [Publisher Link]
[39] A. Basu, G.G. Adams, and N.E. McGruer, “A Review of Micro-Contact Physics, Materials, and Failure Mechanisms in Direct-Contact RF MEMS Switches,” Journal of Micromechanics and Microengineering, vol. 26, no. 10, 2016.
[CrossRef] [Google Scholar] [Publisher Link]
[40] Kurmendra, and Rajesh Kumar, “Investigations on Beam Membrane and Dielectric Materials Using Ashby’s Methodology and their Impact on the Performance of a MEMS Capacitive Switch,” Microsystem Technologies, vol. 27, no. 12, pp. 4269-4289, 2021.
[CrossRef] [Google Scholar] [Publisher Link]
[41] K. Srinivasa Rao, P. Naveena, and K. Girija Sravani, “Materials Impact on the Performance Analysis and Optimization of RF MEMS Switch for 5G Reconfigurable Antenna,” Transactions on Electrical and Electronic Materials, vol. 20, pp. 315-327, 2019.
[CrossRef] [Google Scholar] [Publisher Link]
[42] Yasser Mafinejad, Hamid Reza Ansari, and Saeed Khosroabadi, “Development and Optimization of RF MEMS Switch,” Microsystem Technologies, vol. 26, pp. 1253-1263, 2020.
[CrossRef] [Google Scholar] [Publisher Link]