Design of Low Power Ni-chrome-Platinum Micro-Heater for MEMS-Based Gas Sensor in UAV Applications

International Journal of Electrical and Electronics Engineering

© 2023 by SSRG - IJEEE Journal

Volume 10 Issue 1

Year of Publication : 2023

Authors : V. Vinoth Kumar, G. Sasikala

10.14445/23488379/IJEEE-V10I1P112

How to Cite?

V. Vinoth Kumar, G. Sasikala, "Design of Low Power Ni-chrome-Platinum Micro-Heater for MEMS-Based Gas Sensor in UAV Applications," SSRG International Journal of Electrical and Electronics Engineering, vol. 10,  no. 1, pp. 128-137, 2023. Crossref, https://doi.org/10.14445/23488379/IJEEE-V10I1P112

Abstract:

Environmental hazardous gas detection sensors play a major function in various applications. Most of the commercial sensors available in the market with good electrical characteristics; however, these sensors were not suitable for the applications of air quality monitoring using micro-UAV due to power constraints. To our knowledge, the proposed nichrome/platinum-based micro heater provides a better low power consumption of about 6.5 mW for the operating temperature of 812. 62° K and 4mW for the operating temperature of about 381.38° K among the various micro heaters used for MEMS-based gas sensors. The operating temperature of about 80 % can be increased with the same power utilization. Also, the proposed nichrome/platinum-based micro heater design is used to supply uniform heat intensity to the sensor's sensing film to detect high and low concentrations of oxidized gas from the environment. This proposed micro heater platform provides good temperature distribution with low power consumption comparatively with other micro heaters used in MEMS-based gas sensors. Temperature distribution, surface loss density, and power consumption analysis were done for the proposed micro-heater.

Keywords:

Micro-heater, MEMS gas sensor, Finite Element Method, UAV, Power consumption.

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